Wafer Processing

H-Squared solid end wall 150mm wafer cassette for process temperatures up to 250C (4814)

H-Squared solid end wall 100mm wafer cassette for process temperatures up to 250C (4815)

Suss Microtec Labspin 8 resist coater for wafers up to 200mm (4807)

Milara MiniTouch MTW-1 Semi Automatic Wafer Bumper

AMS TRZ16-SW LL Manual Load Wafer Trim Tool

Delta DI Wafer Cleaner

Milara MiniTouch MTW-1 Semi Automatic Wafer Bumper

Lintec RAD-2500 Wafer Mounter

Verteq A192-50M Wafer Rotor (1307)

Brooks Automation 104760 Wafer Transfer Robot Controller (1898)

Logitech 1P5AC-2500 wafer mounting plate and 1P5AC-2700 spacer ring (3137)

Semitool 470S spin dryer with 150mm wafer carrier (3223)

Verteq A182-80M rotor for 200mm wafers (3267)

Logitech PP8 polishing jig for 150mm wafers (3729)

CEE100 developer with dual nozzles, 200mm wafer chuck, and base cabinet (3730)

Suss MJB3 submicron mask aligner with 350w lamphouse and splitfield optics configured for 3 inch wafers (3731)

Tepla 600-AL (autoload) plasma asher for 200mm wafers with ENI 13.56mHz Rf generator (3795)

Suss Microtec UV Cure bond tooling for 100mm wafers- MA6-BA6 (4091)

Durrex Wafer Mixing Pump

Durrex Wafer Batter Pump

Durrex Wafer Batter Pump

Wafer Production Line

NEC YL473D2 Wafer Marking System

Takano | 58950 36181, Protolusion Sensor (Master), Aligner Wafer Sensor Amp (Master)

KLA-Tencor | ACS-5-0.496, VLSI 4″/100mm 0.496um PSL Wafer