Semiconductor > Semiconductor - Misc > Used TE LABS Alpha-8S Vertical Oxidation Furnace

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Used TE LABS Alpha-8S Vertical Oxidation Furnace

Used TOKYO ELECTRON LABS Alpha-8S Vertical Oxidation Furnace




• Configured for 200mm Wafers
• Serial Number A0000970045
• 1997 Vintage
• TS 4000 Controller
• 4 zone heater element
• 600mm flat zone
• 500-1000 degree C Temp Range
• FTP Option (Fast Thermal Processor)
• Fork Sensor Option
• Quartz Pedestal
• Anhydrous oxidation gas system
• Nitrogen
• Nitrous oxide
• Nitric oxide
• Anhydrous HCI
• Orbital welded VCR gas box
• 480V, 3 phase power
• Includes Quartzware

Photos taken prior to removal

 



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Ad# 381124
  • Make: Tokyo Electron
  • Model:
  • Price:
  • Age: Recent
  • Condition: Good
  • Config: As Shown
  • Weight:
  • Hits: 2104  Views: 321   


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Contact Name: BL Enterprises, Inc Phone: Register Now or Sign In
Rating: No Ratings Posted
Location: California, USA Current Ads: 20 ads posted
Member Since: Aug 03, 2005 Previous Ads: 61

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