New Product: SemiProbe Simultaneous Double Sided Probing System

New SemiProbe Simultaneous Double Sided Probing System For Sale.

Announcing the installation of a new enabling technology
simultaneous double sided prober.

SemiProbe, a global supplier of wafer probing and inspection systems announced the installation of a new enabling technology simultaneous double sided prober.  The system will provide test access to a next generation sensors.  Previously, double sided probers were used primarily as a part of an emission microscope system which required the device to be probed from either the top or the bottom depending upon the orientation of the emission microscope.  

These systems were designed to allow probe contact on either side of the wafer, but not both at the same time.   New devices with active regions on both sides of the wafer as well as some TSV (Thru Silicon Via) technologies will require individual probe contact on both sides of the wafer at the same time.  The new system installed at a leading research laboratory is an enabling technology allowing access to device information never before available thru simultaneous contact with probes on both sides of the wafer.  The system was equipped to utilize either individual probes or a probe card on the top and individual probes on the bottom.  Both top and bottom platens have controlled automated movement to bring the probes in and out of contact.  The stage on the system is manual with controls for X, Y, Z and theta. 

Wafers are mounted using mechanical clips on a wafer carrier that mounts into the carrier holder on the stage.  The installed system has both 100 mm and 150 mm wafer carriers with the ability to add a 200 mm wafer carrier.  According to Don Feuerstein, VP of SemiProbe, “Providing our customers with new contact capabilities that enable them to test their most challenging new products today, allows us to create new systems that will meet the needs of larger markets in the coming years.”