Semiconductor > Deposition Equipment > Denton Explorer Thin Film Deposition Platform

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New Product For Sale Listings New Product: Denton Explorer Thin Film Deposition Platform

Posted: Friday, June 29, 2012    Location: Moorestown, New Jersey, USA

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  • Company Name: Denton Vacuum U.S.A
  • Location: Moorestown, New Jersey, USA
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Ad Details - #413883
Denton - Explorer
  • Make: Denton
  • Model: Explorer
  • Description: Denton Explorer Thin Film Deposition Platform The Explorer® offers the widest range of configurations and deposition modalities in the thin fi ... Read More
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Denton Vacuum U.S.A
LabX Member since August 2009.
In business since 1964.

Since 1964 Denton Vacuum, LLC has designed and manufactured cutting edge thin film deposition systems for R&D and manufacturing. Proprietary systems, developed to customer specifications, and standard thin film systems are available.
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Ad Description

Denton Explorer Thin Film Deposition Platform

The Explorer® offers the widest range of configurations and deposition modalities in the thin film industry.

The Explorer® offers the widest range of configurations and deposition modalities in the thin film industry: Electron beam evaporation, resistance evaporation, sputtering, ion plating, and ion assisted deposition.

Able to Sputter dielectric, magnetic, and composite materials. Flexible cathodes that adjust to the impingement angle are also available.

 

Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.

Process Pro Upgrade Offers:

  • Consistent controls across all Denton Vacuum Products
  • Standard software makes it easy to support and avoid costly customization fees
  • Source code for your programs so you can customize your programs.
  • Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.

Large Load Locks accomodate substrates up to 10"

Multiple Pumping Configurations
A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.

  

Typical Appications

PECVD

  • Materials Research
  • Small Batch Systems
  • 3D Objects
  • Coat a Variety of Materials

Sputtering

  • Materials Research
  • Product QC & QA
  • Semiconductor Failure Analysis
  • CD Mastering
  • Nanotechnology
  • Compound Semiconductors
  • OLEDs

Evaporation

  • Materials Research
  • Ion Assisted Deposition (IAD)
  • Medical Devices
  • Telecommunications
  • CD Mastering
  • Lift-Off
  • Protective Coating
 
Options
Evaporation
Sputtering
PECVD
Substrate heat up to 500°C
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Process Pro controls
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Co-sputtering  
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RF / DC / Pulsed power supplies  
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Ion source
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LN2 cooled sample stage
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Glass bell jar (Explorer M)
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Pump Options      
Diffusion
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Cryogenic
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Turbo
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Dry scroll
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Oil free
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