Semiconductor > Deposition Equipment > Plasma-Therm Versaline™ Platform

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New Product For Sale Listings New Product: Plasma-Therm Versaline™ Platform

Posted: Saturday, July 21, 2012    Location: St Petersburg, Florida, USA , 33716

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  • Company Name: Plasma-Therm
  • Location: St Petersburg, Florida, USA , 33716
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Ad Details - #425785
Plasma-Therm LLC - VERSALINE®
  • Make: Plasma-Therm LLC
  • Model: VERSALINE®
  • Description: Plasma-Therm VERSALINE® The VERSALINE® platform gives customers upgrade options that allow equipment to grow from a manual load configurat ... Read More
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Plasma-Therm
LabX Member since January 2010.
In business since 1980.

Plasma-Therm LLC is the global technological leader for providing thin film etch and plasma deposition equipment to a number of high tech market segments and industries. These customer focused solutions are used in areas ranging from university R&D to high volume production.
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Ad Description

Plasma-Therm VERSALINE®

The VERSALINE® platform gives customers upgrade options that allow equipment to grow from a manual load configuration to a single-substrate or batch carrier loadlock to a fully automated cassette-to-cassette handler.

Plasma-Therm’s VERSALINE® platform is the workhorse for a variety of applications in the specialty semiconductor markets. It incorporates a modular design that enables flexible configuration of substrate handling and technologies that address a wide range of customer requirements.

 

Substrate Handling Configurations
The VERSALINE® platform provides flexibility of a variety of handling options. Additionally, the VERSALINE® platform gives customers upgrade options that allow equipment to grow from a manual load configuration to a single-substrate or batch carrier loadlock to a fully automated cassette-to-cassette handler.

  • ML — manual loading for single substrate or batch

  • LL — loadlock for single substrate or single batch carrier

  • CX — cassette loading

Etch

  • VERSALINE® ICP

  • VERSALINE® DSE

  • VERSALINE® RIE

Deposition

  • VERSALINE® PECVD

  • VERSALINE® HDPCVD

Process Control

  • EndpointWorks™ available with various endpoint technologies

Productivity Enhancements

  • Data logging

  • AMS (Automated Maintenance Scheduler)

  • SECS/GEM

More info about the Plasma-Therm Versaline™ Platform