Plasma-Therm 790™ Series.
The 790™ platform, offered in both RIE and PECVD configurations, has been field demonstrated to have low maintenance requirements and is easily operated in R&D through high production environments.

Plasma-Therm’s 790™ platform is the latest in the 790™ Series of cost-efficient systems. With a large worldwide install base, the 790™ platform, offered in both RIE and PECVD configurations, has been field demonstrated to have low maintenance requirements and is easily operated in R&D through high production environments. Its reputation for robust performance makes the 790™ Series a preferred platform for R&D and production sites.
Process Control
- EndpointWorks available with various endpoint technologies
Productivity Enhancements
- Data logging
- EndpointWorks

More info about the Plasma-Therm 790™ Series Platform