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MRC Model 603 Side Sputtering System
For Sale: MRC Model 603 Side Sputtering System
Posted: Monday, February 18, 2013 Location: Santa Clara, California, USA
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Ad Details - #487559
- Make: MRC
- Model: 603
- Age: Used
- Condition: Good
- Config: As Shown
- Price: Please Call Availability: In Stock
- Description: Side Sputtering System Capable up to 6" Wafers - Three Target RF & DC Side Sputtering System With Etch Features: Three targets 5 ... Read More
- Contact Name: SPEC Process Equipment Corp.
- Location: Santa Clara, California, USA
- Member Since: January 24, 2007
- Rating: No Ratings Posted
- Current Ads: 205 Ads Posted
- Previous Ads: 468
Hits: 1697 | Views: 118
Ad Description
Side Sputtering System Capable up to 6" Wafers - Three Target RF & DC Side Sputtering System With Etch
Features:
- Three targets 5 in. x 15 in.
- Sputter etch capability
- Quartz substrate heaters, substrate
- Substrate carrier 13 in. x 13 in
- Cryo pump and roughing pump.
Specifications:
- Temperature adjustable to 400 deg. C
- Optional 3 kW 13.56 MHz RF generator 10 kW DC Magnetron power supply adjustable to 850 V and 25A.
SPEC Process Equipment Corp. is a LabX Sponsor.
Please visit their website at: http://www.specequipment.com
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