ClassOne Equipment Announcing KLA AIT, SP1 & SP2 Service and Support!
We are excited to announce that Lyn Bursey, Senior Metrology Technician, and Ed Dukats, Service Manager, have joined ClassOne Equipment to provide service and support of KLA AIT, SP1 and SP2 platforms - worldwide. Ed and Lyn join ClassOne with over 10 years each of field service experience, and are now available to provide you with great service on your legacy KLA defect inspection tools!
Service support now offered on the following models:
- AIT I
- AIT II
- AIT XP
- AIT XP+ Fusion
- AIT UV / XUV
- AIT UV+
- SP1 Classic
- SP1 TBI
- SP1 DLS
- SP2
Service options include:
- Laser Replacement
- Service calls for troubleshooting, parts replacement, recovery
- Corrective or Preventive Maintenance contracts
- De-installation and tool moves with equipment lockdowns
- Installation and Qualification
- Warranty Service
- Refurbishment and/or Reconfiguration of system
More About ClassOne:
ClassOne Equipment provides refurbished equipment from top manufacturers KLA-Tencor, Suss, EVG, Semitool, STS, Disco, and Hitachi at prices up to 65% less than the cost of a new tool. We have over 500 tools in stock. Here is a selection of hot tools currently in stock:
- Mask Aligners: EVG 420, EVG 620, Suss MA6, Suss MA150cc
- Wafer Bonders: EVG 501, 520, 520IS & Suss SB8e
- Etchers: STS Pegasus ICP, STS Multiplex ICP, Oxford 80 Plus RIE
- Wet Process: Semitool Equinox, SAT, SST, LT210C ECD, Raider
- Defect Inspection: KLA Surfscan 6220, 6420, SP1, AIT I, AIT II, AIT UV
- Surface Metrology: KLA P11, P22, HRP-220 profilers, RS75 4-pt probes
- Thin Film Measurement: KLA UC1080, KLA UV1280, Nanospec 4000
All equipment is refurbished to OEM specifications, includes a 3 or 6 month warranty, as well as installation and training.
Please call, contact us through the form on the right, or click here for your semiconductor equipment requirements and details on our service and support.