For Sale: AccuThermo AW 610V Vacuum RTP
Posted: Thursday, April 4, 2013 Location: Santa Clara, California, USA , 95054
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AccuThermo AW 610V SYSTEM DESCRIPTION
AccuThermo AW 610V is a manual desktop vacuum rapid thermal processing (RTP) system for 2 to 4 inch or 4 to 6 inch wafers, which uses high intensity visible radiation to heat single wafers for short process periods of time at precisely controlled temperatures and vacuum. The process periods are typically 1-600 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities, combined with the heating chamber's cold-wall design and superior heating uniformity, provide significant advantages over conventional furnace processing.The AccuThermo RTP system consists of an oven unit and a controller computer running the Advanced Allwin21 AW-900 controller software. The wafer to be processed is placed on a quartz tray that slides into the chamber with quartz window plate in the oven unit. The lamps above the quartz window provide the source of energy for heating the wafer. The lamps can be controlled manually and automatically from the controller computer.
The AW-900 control software allows full control and diagnostics of the AccuThermo RTP system. In addition, it allows the creation of recipes for automated control of the temperature and, optionally, process gas flow. The control software uses a set of operating instructions known as recipes to automatically control the AccuThermo RTP system. These recipes are created by the Process Engineer to monitor and control the parameters of the processing cycle. The Operator then uses the software to select and run the process parameters (steady state temperature, process time, ramp rates, etc.). The AW-900 software is also used to create, delete, copy, modify and store the recipes and to execute system diagnostics.
AccuThermo AW 610V KEY FEATURES
AccuThermo AW 610V APPLICATIONS
HEATING, COOLING, AND TEMPERATURE MEASUREMENT
The following list contains the key features of the AccuThermo RTP system heating, cooling and temperature measurement systems:
Following are the specifications for the AccuThermo Rapid Thermal Processor (RTP) system.
Allwin21 is the exclusive licensed manufacturer of AG Heatpulse 610 Rapid Thermal Processor.
Allwin21 Corp is a LabX Sponsor.