Manufacturer: Hitachi Condition: Used Model: Hitachi FE-SEM 4700
Technical Speification for Hitachi FE-SEM 4700
Secondary electron image resolution .jpg)
2.1 nm guaranteed (at 1 kV)
1.5 nm guaranteed (at 15 kV and W.D. 12 mm or X-ray analysis position)
Backscattered electron image resolution (optional)
3.0 nm guaranteed (at 15 kV YAG detector, optional)
Cold finger and specimen exchange chamber as standard. Allowing sample exchange via airlock without repositioning
Optional integrated EDX system with 30 degree take-off angle
Fully digital imaging, image processing and archiving system
Dual SE detectors for versatile imaging (SE and BSE)
ExB energy filter
The Hitachi FE-SEM 4700 ombines the versatility of PC control with a novel electron optical column to give exceptional performance on large and small specimens. Resolution of 1.5nm at 15kV is guaranteed at the EDX and specimen exchange position of 12mm working distance!
The SHitachi FE-SEM 4700 lso offers excellent low kV performance with guaranteed resolution of 2.1 nm at 1 kV, at a working distance of 1.5mm. Two versions, Type I and Type II, are available, differing in the specimen stage size. The S-4700 Type II features a five axis eucentric motorized stage which will accommodate specimens up to 150 mm in diameter.
Pre-programmed operating modes allow the user to switch from high-resolution conditions to microanalysis conditions at the click of the mouse with no change of objective aperture. The fully integrated new ExB filter opens the door to low voltage, high resolution, backscattered imaging never before possible on a conventional SEM.
Sample tilt of 45 degrees without change in working distance
Convenient and useful beam shift of +/-15um
Electron optics
Electron gun Cold field emission electron source 
Acc. Voltage 0.5
30 kV (variable at 0.1 kV/step)
Probe current 1 pA
2 nA (depends on Acc. voltage)
Magnification x 20
x 500,000
Objective aperture Heated aperture, 4-openings, selectable and alignable outside the vacuum
Specimen stage Type II
Load lock size 150 mm
Traverse X: 0 - 100 mm
Y: 0 - 50 mm
Z: 1.5 - 30 mm
T: Minus 5 - 60 deg.
R: 360 deg. Continuous
Drive: PC controlled, 5-axis Eucentric stage
Image display
Computer and OS PC/AT compatible, OS: Windows 2000(R)*
Large color CRT
Scan mode Normal, Split/dual mag./line scan, position
set, spot, AAF, SAA, oblique
Frame memory 640 x 480 pixels, 1,280 x 960 pixels,
2,560 x 1,920 pixels
Image filing Image data base with various reference
functions built-in
Image file format BMP, TIFF, JPEG selectable
Scan speed TV, slow (0.5 ~ 40 s/frame) for viewing
Slow (40 ~ 320 s/frame) for recording
Image processing Automatic image brightness & contrast,
raster rotation, autofocus, auto-stigmation,
averaging, frame integration, color display
Auto data recording Film numbering, acc. voltage, micron bar
with a scale, magnification, date, hours and
working distance
Electrical image shift ±15 µm (at W.D. = 12 mm)
Vacuum system
System Automatic vacuum sequence
with pneumatic valve controls
Vacuum 10-7 Pa (electron gun),
10-4 Pa (specimen chamber)
Pumps Fore pumps 140 l/min (168 l/min)
x 2 sets, ( ) is for 60 Hz operation.
Turbo pump 300 l/s x 1 set,
and Ion pumps x 3 sets
Protection System protected against power,
water and vacuum failures.