Shuttlelock 770 ICP (Ion Coupled Plasma)Etcher, Load Lock Shuttle Lock transfer, Single chamber ICP,RFPPRF5S RF power supply w/AM5, Six zone heater,PM5 Pressure Controller, RF20M w/phase,He backside cooled,Model 919 Hot Cathode Controller,VAT Adaptive Pressure Controller,(8) MFCs-gas(BCL3,Cl2,HBr,N2,N2,N2,H2,N2),Leybold 600C, Leybold D40B CS,Leybold D16B, Sofie Endpoint