For Sale: Used Plasmatherm 770 ICP Shuttlelock (Ion Coupled Plasma) Etcher
Originally Found: Wednesday, June 19, 2013 Location: Wake Forest , North Carolina, USA
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Ad Details - #LV28567693
Direct Source Surplus
LabX Member since December 2006.
DSS specializes in management & distribution of front end & metrology process equipment. With over 20 years in the semiconductor business, DSS offers our customers a highly economic choice of previously owned surplus equipment ranging in age and condition.
Ad DescriptionUsed Plasmatherm 770 ICP Shuttlelock (Ion Coupled Plasma) Etcher
Shuttlelock 770 ICP (Ion Coupled Plasma)Etcher, Load Lock Shuttle Lock transfer, Single chamber ICP,RFPPRF5S RF power supply w/AM5, Six zone heater,PM5 Pressure Controller, RF20M w/phase,He backside cooled,Model 919 Hot Cathode Controller,VAT Adaptive Pressure Controller,(8) MFCs-gas(BCL3,Cl2,HBr,N2,N2,N2,H2,N2),Leybold 600C, Leybold D40B CS,Leybold D16B, Sofie Endpoint
Used Plasmatherm 770 ICP Shuttlelock (Ion Coupled Plasma) Etcher
Please note: Originally found: Wednesday, June 19, 2013