Plasmatherm 790 PECVD, non-load lock,11" upper & lower electrode, Seren 500W 13.56Mhz RF power supply matching network, ENI 600W 13.56Mhz RF power supply, Lower electrode heated platen with Watlow controller,(8) MFCs, VAT gate valve,Plasmatherm PC Window based OS, 208V 60Hz, 60A