Semiconductor > Etchers/Ashers > Used Plasmatherm-Unaxis VLR ICP (3) Cassette to Cassette LM/TM

Share:

For Sale Listings For Sale: Used Plasmatherm-Unaxis VLR ICP (3) Cassette to Cassette LM/TM

Originally Found: Wednesday, May 15, 2013    Location: Wake Forest , North Carolina, USA

Contact the Company
  • Company Name: Direct Source Surplus
  • Location: Wake Forest , North Carolina, USA
  • Your Information: * required information
  • Additional Information:

Ad Details - #LV28567793
  • Item ID: LabX261
  • Make: Plasmatherm-Unaxis
  • Model: VLR ICP Plasmatherm
  • Price: Please Email Availability: In Stock
  • Description: Plasmatherm VLR ICP Cassette to Cassette LM/TM with dual end-effectors,(3)VLR ICP module,Configured for 6" dia. wafer with Clamp, PM1 & PM2 confi ... Read More
Company's Information
Direct Source Surplus
LabX Member since December 2006.

DSS specializes in management & distribution of front end & metrology process equipment. With over 20 years in the semiconductor business, DSS offers our customers a highly economic choice of previously owned surplus equipment ranging in age and condition.

Ad Description

Used Plasmatherm-Unaxis VLR ICP (3) Cassette to Cassette LM/TM
Plasmatherm VLR ICP Cassette to Cassette LM/TM with dual end-effectors,(3)VLR ICP module,Configured for 6" dia. wafer with Clamp, PM1 & PM2 configuration:(8) MFCs,VAT PM5 Throttle valve controller, Edwards STP-A-1303CV2 turbo pump with STPA803C/A1303C controller,ENI 600W RF Power supply for lower electrode with AM5 matchwork and tunner, Advanced Energy RFPP 20M RF power supply for upper electrode with AM20 matchwork and tunner,Heated chamber walls with 6 zone controller, Heated vacuum plumbing lines with separate BriskOne controllers. PM3 configuration:configuration:(8) MFCs,VAT PM5 Throttle valve controller, Leybold Mag 1500CT turbo pump with MagDrive 2000 controller,Advanced Energy RF5S 500W Power supply for lower electrode with AM5 matchwork and tunner, Advanced Energy RFPP 20M RF power supply for upper electrode with AM20 matchwork and tunner,Heated chamber walls with 6 zone controller, LM-TM: Single Load lock, Plamatherm Versaworks software, 208V, 30A 60Hz

Please note: Originally found: Wednesday, May 15, 2013