Patterned Wafer Inspection sytem Capable of up to 300mm wafers Multiple Spot Optics (5,7 & 10 um)Advanced Collection Optics Configureration, Internal Microscope,AutoFocus Capability,Automatic Coordinate Registration and Alignment,Region High Resolution Color Monitor,Standard Network Communication Capability, Supports Windows NT, Supports 10Base-T and BNC (10Base-2),Robot Protective Cover,KLARF Output File,Cassette Platform,Low Contact Vacuum Chuck/Locator for 200mm wafers,Network Connection Option,GEM/SECS Interface 200-240V, 4 wire, 50/60Hz, 3 phase, 34 amps max.