Surfscan Capable of up to 200mm wafers Currently configured for 200mm wafers with PA-172 cassettes Red light laser for Non-Patterned Surface Inspection System 0.15 micron Defect Sensitivity @ 95% capture, based on PSL Standards 0.02 ppm Haze Sensitivity 0.002 ppm Haze Resolution Accuracy within 1% using approved VLSI Standard