CHA SEC 1000 RAP 4 pocket E-Beam evaporator, Granville Phillips 260 Ion gauge controller, Auto Tech II Valve sequence control w/hoist option, Motorized Hoist, Foreline Sieve trap model KEL-170, CV8-110 power supply, Airco STIH 270-2 E-Beam gun, Inficon IC6000 w/ crystal sense head, Leybold D30, CTI 10 cryo with 8510 compressor, 110-208V 60Hz/5 wire 3 phase