For Sale: Canon MPA 600FA Mirror Projection Aligner

Originally Found: Wednesday, June 12, 2013 Location: Santa Clara, California, USA

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Company Name: SPEC Process Equipment Corp.
Location: Santa Clara, California, USA

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Ad Details - #LV28907694

Canon MPA 600FA Mirror Projection Aligner

Make: Canon MPA 600FA Mirror Pr
Price: Please Email Availability: In Stock
Description: Description: This mirror projection aligner has a single auto-feeder. It is cassette to cassette and also has backside wafer handling. Features: Auto ... Read More

Company's Information

SPEC Process Equipment Corp.

LabX Member since January 2007.

SPEC offers hundreds of quality brand name and hard-to-find front-end semiconductor equipment - in stock in our 20,000 square foot facility. We remanufacture most products to meet manufacturer's original specifications.

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Ad Description

Canon MPA 600FA Mirror Projection Aligner

Description:

This mirror projection aligner has a single auto-feeder. It is cassette to cassette and also has backside wafer handling.

Features:

Autofeeder: single, cassette to cassette
Backside wafer handling

Specifications:

Illumination: 2kW high pressure mercury lamp
Intensity: > 600mW / cm2 (6 inch wafer)
Illumination uniformity: ± 3%
Resolution: 1.5µm
Depth of focus: > + 6µ (line width: 1.5µm)
Magnification: < 0.4µm
Distortion: 3 sigma < 0.5µm
Scanning accuracy: < 1.5%
Auto-alignment accuracy: LBS AA 3 sigma < 0.6µm (HeNe laser beam scan)