PLASMATHERM 790 PECVD SYSTEM consisting of: - Model: 790 - PECVD Chamber- Capable of processing up to 6"/150mm wafers - Currently set for: 4"/100mm (single wafer)- Manual Wafer Load Chamber (Non-Load Lock)- RFPP LF-5 RF Generator, Low Frequency, 50-460 kHz - Substrate Heat- System Computer, Keyboard and Mouse- Brand New LCD Monitor - Edwards QDP80 Vacuum Pump with Blower (Professionally Rebuilt)- System Chiller - Watlow Series 945 Controller - Emergency Shut Off Button (EMO)- Electrical Power Box - System Power: 208V, 3PH, 60Amp, 50/60Hz- Operations Manual - Serial Number: PTI-78177F - Refurbished to Meet Original Plasmatherm 790 specs- Available for Full Inspection and Demonstration at ClassOne!- Our Refurbishment Process: http://www.classoneequipment.com/content/etching-systems Gas Configuration:- Process Gas Helium (He): 5~20 psig- Process Gas Ammonia (NH3): 5~20 psig- Process Gas Silane (2%SiH4/98%N2): 5~20 psig- Machine Gas (fluid input Panel) Nitrogen (N2): 5~7 psig @1 slpm- Cleaning Gas Halocarbon-Oxygen (92%CF4/8%O2): 5~20 psig- Vent/Vacuum Bleed Gas Nitrogen (N2): 5~7 psig @ 10sccm- Flush Gas Nitrogen (N2): 15~20 psig @ 1 slpm ClassOne Support Worldwide of Plasmatherm Etchers:- ClassOne Supports all our Used and Refurbished Plasmatherm PECVD Systems with Spare Parts and Service Worldwide- Installation & Training available Worldwide