For Sale: Plasmatherm 790 PECVD for sale
Originally Found: Tuesday, May 21, 2013 Location: Decatur, Georgia, USA
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Ad Details - #LV28999615
LabX Member since August 2006.
ClassOne specializes in selling high quality preowned equipment to the Semiconductor and Nanotechnology Industries including MEMS, Compound Semiconductors, Optoelectronics, Microelectronics, Science, and Technology. We focus on equipment used for wafer fabrication, metrology, assembly, and test. We strive to offer high quality equipment in excellent condition at the most competitive prices.
Ad DescriptionPlasmatherm 790 PECVD for sale
PLASMATHERM 790 PECVD SYSTEM consisting of: - Model: 790 - PECVD Chamber- Capable of processing up to 6"/150mm wafers - Currently set for: 4"/100mm (single wafer)- Manual Wafer Load Chamber (Non-Load Lock)- RFPP LF-5 RF Generator, Low Frequency, 50-460 kHz - Substrate Heat- System Computer, Keyboard and Mouse- Brand New LCD Monitor - Edwards QDP80 Vacuum Pump with Blower (Professionally Rebuilt)- System Chiller - Watlow Series 945 Controller - Emergency Shut Off Button (EMO)- Electrical Power Box - System Power: 208V, 3PH, 60Amp, 50/60Hz- Operations Manual - Serial Number: PTI-78177F - Refurbished to Meet Original Plasmatherm 790 specs- Available for Full Inspection and Demonstration at ClassOne!- Our Refurbishment Process: http://www.classoneequipment.com/content/etching-systems Gas Configuration:- Process Gas Helium (He): 5~20 psig- Process Gas Ammonia (NH3): 5~20 psig- Process Gas Silane (2%SiH4/98%N2): 5~20 psig- Machine Gas (fluid input Panel) Nitrogen (N2): 5~7 psig @1 slpm- Cleaning Gas Halocarbon-Oxygen (92%CF4/8%O2): 5~20 psig- Vent/Vacuum Bleed Gas Nitrogen (N2): 5~7 psig @ 10sccm- Flush Gas Nitrogen (N2): 15~20 psig @ 1 slpm ClassOne Support Worldwide of Plasmatherm Etchers:- ClassOne Supports all our Used and Refurbished Plasmatherm PECVD Systems with Spare Parts and Service Worldwide- Installation & Training available Worldwide
Plasmatherm 790 PECVD for sale
Please note: Originally found: Tuesday, May 21, 2013