For Sale: Fully refurbished Tegal 901e plasma etcher/RIE system
Originally Found: Friday, May 17, 2013 Location: Santa Clara, California, USA
Contact the Company
Ad Details - #LV29026198
LabX Member since August 2007.
In business since 2000.
Allwin21 Corp. was formed in 2000 to provide semiconductor equipment, services and technical support in Semiconductor industry,MEMS, Biomedical, Nanotechnology,Solar. Located in Santa Clara, the heart of Silicon Valley, Allwin21 has been providing unique technical support, high quality equipment and fast supplied spare parts worldwide.
Fully refurbished Tegal 901e plasma etcher/RIE system Click to EnlargeAll Plasma Etch/RIE/ICP Systems: Tegal 901e | Tegal 903e |Tegal 901e TTW | Tegal 903e TTW | Lam Rainbow 4420/4428 | Lam Rainbow 4520/4528 | Lam Rainbow 4620/4628 | Lam Rainbow 4720/4728 | Lam AutoEtch 490 | Lam AutoEtch 590 | Lam AutoEtch 690 | Lam AutoEtch 790 | Matrix 303 | Gasonics AE 2001 | STS Multiplex ICP Model:Fully refurbished Tegal 901e Plasma Etcher/RIE Maker:Tegal Condition:Fully Refurbished by Allwin21 Corp. Lead Time:6-8weeks Price:We will do our best to meet your budget.Please contact us by e-mail. Warranty: 6 to 12 months non-consumable parts warranty. Amount in stock: 6 setsDescription: Cassette To Cassette In-line Single Wafer Plasma Etcher.Capability to etch vias and contacts with anisotropic or sloped profiles.For etching silicon dioxide, silicon nitrides, and polyimides.Can handle wafers from up to 6 in. Microprocessor control.208 V, 50/60 Hz. Tegal 901e series Plasma/RIE etch System are used by the Semiconductor Industry for integrated circuit fabrication. The system are used in one part of the sequence of manufacturing steps that transfer a pattern formed from a layer of photosensitive material, the photoresist, to a layer that makes up a permanent part of the final device. The process of defining a pattern with photoresist known as photolithography, while the etch process transfers the photoresist pattern to the permanent layer.Tegal 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture semiconductor, telecommunications and optoelectronics devices, flat panel displays and thin film magnetic heads.Tegal 901e ,are designed around a production-proven wafer transport design that can accommodate 75 mm to 150 mm round silicon, GaAs, InP, and dielectric material substrates. The transport can also be configured to accommodate rectangular substrates up to 125 mm on a side. Typical Applications for Tegal 901e :1. Nitride etch, 2. Photoresist Descum, 3. Polyimide and BCB etches, 4. Zero Layer Etch, 5. Backside Etch, 6. Isotropic Oxide Etch,7. Non-critical Polysilicon Etch8. Titanium/Tantalum Alloy Etch.
Fully refurbished Tegal 901e plasma etcher/RIE system
Please note: Originally found: Friday, May 17, 2013