For Sale: Temescal FC 1800 E-Beam Evaporator

Originally Found: Wednesday, May 22, 2013 Location: Santa Clara, California, USA

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Company Name: SPEC Process Equipment Corp.
Location: Santa Clara, California, USA

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Ad Details - #LV29185607

Make: Temescal FC 1800 E-Beam E
Price: Please Email Availability: In Stock
Description: Description: The Temescal FC-1800 E-Beam Evaporator is designed for material deposition by evaporation. Features: Load locked source tray for ... Read More

Company's Information

SPEC Process Equipment Corp.

LabX Member since January 2007.

SPEC offers hundreds of quality brand name and hard-to-find front-end semiconductor equipment - in stock in our 20,000 square foot facility. We remanufacture most products to meet manufacturer's original specifications.

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Ad Description

Temescal FC 1800 E-Beam Evaporator

Description:

The Temescal FC-1800 E-Beam Evaporator is designed for material deposition by evaporation.

Features:

Load locked source tray for fast cycle time
Fully automatic valve sequencing
Deposition controller
Electron Beam Power Supply with X-Y sweep
Four pocket electron beam gun with motorized pocket indexer
CTI Cryo pump and compressor

Specifications:

20" x 11" diameter chamber size bell jar
Cycle time: 10 to 15 minutes for 1u of aluminum
Coating uniformity: +/- 7% with high speed planetary substrate fixtures
Source chamber: 18" diameter (457mm)
Source tray: 19" diameter