UV curing system for reducing the adhesive strength of UV sensitive dicing tapes, effective UV wavelength 365nm, holds wafers up to 200mm, ozone free UV irradiation source, timer, UV-intensity meter, lamp hour and status indicator, 110v,

see www.eshal.com model UV-946 for more information.

Single-frame, up to 8" wafers, UV dosage control, user-friendly digital display, lamp life indicator, lamp ON and UV intensity monitoring.

Compact Desktop Design - A compact system, the UV-956 does not require nitrogen or other special utility hookups, allowing for simple installation. Simply plug it in and it is ready to go.

Safe, Ozone-free UV Irradiation - Uses optimized wavelength for UV curing process. Low-pressure mercury vapor lamps do not require special cooling or nitrogen systems to counteract harmful ozone emissions. The UV-956 provides a safe operating environment and economical utility requirements.

The UV-956 is the most advanced system in its class, with built-in UV irradiation Dosage Control for controlled, repeatable UV tape curing for single-frame processing. The UV-956's digital control panel displays all process parameters on-line. The system handles all standard wafer/frame combinations up to 8" on its 300mm diameter UV irradiation window.

Wafer/Frame size: All standard sizes, up to 8".

UV wavelength: 365nm.
Throughput: 50 frames/hr.*

Electronic Timer: Resolution: 1 sec.

Electrical utility: 110 or 240 Vac, 50/60 Hz.
Power: 100 W (peak).

Dimensions: (H x W x D) 8” x 19” x 16”
(20 x 48.5 x 40.5 cm).

Height: 23” (58 cm). (Cover open).
Weight: 44 lbs. (20 kg).
Test conditions: UV tape curing energy required = 200mJ/cm2 with silicon wafer.

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