Denton Explorer Thin Film Deposition Platform

The Explorer® offers the widest range of configurations and deposition modalities in the thin film industry.

The Explorer® offers the widest range of configurations and deposition modalities in the thin film industry: Electron beam evaporation, resistance evaporation, sputtering, ion plating, and ion assisted deposition.

Able to Sputter dielectric, magnetic, and composite materials. Flexible cathodes that adjust to the impingement angle are also available.

Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.

Process Pro Upgrade Offers:

Consistent controls across all Denton Vacuum Products
Standard software makes it easy to support and avoid costly customization fees
Source code for your programs so you can customize your programs.
Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.

Large Load Locks accomodate substrates up to 10"

Multiple Pumping Configurations
A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.

Typical Appications

PECVD

Materials Research
Small Batch Systems
3D Objects
Coat a Variety of Materials

Sputtering

Materials Research
Product QC & QA
Semiconductor Failure Analysis
CD Mastering
Nanotechnology
Compound Semiconductors
OLEDs

Evaporation

Materials Research
Ion Assisted Deposition (IAD)
Medical Devices
Telecommunications
CD Mastering
Lift-Off
Protective Coating

Options	Evaporation	Sputtering	PECVD
Substrate heat up to 500°C
Process Pro controls
Co-sputtering
RF / DC / Pulsed power supplies
Ion source
LN2 cooled sample stage
Glass bell jar (Explorer M)
Pump Options
Diffusion
Cryogenic
Turbo
Dry scroll
Oil free

ULVAC

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