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Covering a wide range of pumping speed from 100 m3/h to 1000 m3/h, the A3P range responds to every 300 mm medium process vacuum requirement at the lowest utilities cost.
Up to 50% power concumption reduction compared to conventional pumping solutions, one of the lowest water cooling flow and reduced N2 purge are some of the main key features. And all of this with up to 50% footprint reduction.