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The JSM-6701F is a field emission scanning electron microscope (FESEM) incorporating a cold cathode field emission gun, ultra high vacuum, and sophisticated digital technologies for high resolution high quality imaging of micro structures. Featuring a conical FE gun and a semi-in-lens objective lens, the system is capable of high resolution imaging as well as high quality real time image display at all scan speeds, enabling observation and recording of superior images even in a bright room. The JSM-6701F is able to handle samples up to 8 inches in diameter.

The JSM-6701F is a super intelligent PC SEM assuring compatibility with future computer technologies. Its unique graphical user interface controls condition setup, motor stage drive, imaging, and data filing, assuring stable and reliable operation. Using Window® XP with superior networking as a host computer, the system facilitates the process from imaging to data processing under optimum conditions, allowing the operator to display real time images, save the data in an external PC through the network, retrieve and manipulate the data.

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