KLA-Tencor Surfscan 6220 (SFS 6220)

Wafer Surface Contamination Analysis System

The SFS 6220 tool is used for wafer surface contamination analysis of unpatterned semiconductor wafers.

System is calibrated, tested, crated. Installation and training services are available.

Please contact us if interested in the Surfscan 6200/6220 system or any other refurbished Surfscan models (6100, 6200, 6220, 6400, 6420, SP1/TBI) via email a@semiphoton.com or website www.semiphoton.com. Thank you!

Description

Condition: Refurbished, Operational, Calibrated & Tested

Lead-Time: System is refurbished and ready for shipment (no lead-time)

Warranty: 30 Days (extended warranty is available upon request)

Country of Origin: USA

Manufacturer: KLA-Tencor

Specifications

• Substrate Sizes: 50mm(2"), 76mm(3"), 100mm(4"), 125mm(5"), 150mm(6"), 200mm(8") wafers

• Substrate Material: Silicon or any opaque, polished surface which scatters less than 5% of incident light.

• Defect Sensitivity: 0.10µm diameter PSL sphere equivalent with greater than 90% capture rate.

• Haze Sensitivity: 0.02ppm

• Haze Resolution: 0.002ppm

• Repeatability: 0.5% at 1σ (mean count greater than 500, 0.364 µm diameter latex spheres)

• Dynamic Range: 0.01µm to 9,999µm in a single measurement.

• Throughput: Up to 100 w/hr using 150mm wafers

• Cassette Handling: Single puck wafer handling from two cassette (one sender/receiver, one receiver)

• Illumination Source: New Solid State Laser with power supply/control box (488nm, 30mW)

• Operator Interface: New LCD monitor, keyboard, mouse

• Color coded defect maps, histograms, magnified views of individual defects.

• Operation System and Software: Windows 98, ver. 4.2

• Manuals

Quality Control

• The SFS 6220 is calibrated and tested.

Physical Characteristics

• Instrument Dimensions: Height: 168 cm (66”) Width: 75 cm (29.5”) Depth: 77 cm (30.25”)

• Instrument Weight: 240 kg (530 lbs)

• Crate Dimensions: Height 196 cm (77”) Width: 112 cm (44”) Depth: 122 cm (48”)

• Crate Weight: 460 kg (1010 lbs)

Installation Requirements

• Vacuum: 508 mm (20 in.) Hg

• Electrical: 208-240V, 50/60 Hz

• Power Requirement: 2 kVA

• Ducted Venting: Two 102 mm (4”) exhaust hoses

• Environment: Class 10 or better

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Refurbishment process follows all OEM refurbishment procedures to meet OEM installed specification:

Install/Upgrade New Solid State Laser (improved laser lifetime and reduced laser electrical power consumption)
Install/Upgrade New Power Supply/Control Box for the Solid State Laser
Install/Upgrade New Single Board Computer 800MHZ speed
Install/Upgrade New USB 2.0 Ports Thumb Drive (Replaces Floppy Drive)
Install/Upgrade New Color LCD Monitor
Install/Upgrade PDF Software for PDF creation (Replaces Printer)
Install New Wafer Paddle with OEM Moly Substrate
Rebuilt Indexer, Shuttle Drive
Refurbish/Replace Motors, Belts, Bearings
New Lead Screw Nut assembly
New Industrial Solid State Hard Drives
Install/Upgrade Security Key Dallas Chip
New Main Power Supply
Clean or Replace Optics and Mirrors
Refurbish Load Arm and Lead Screw
Refurbish Cassette Elevators and Re-Anodize Plates
Refurbish All Wiring or Replace
Refurbish All Switches or Replace
New User Interface Keypad
New PS/2 Keyboard and PS/2 Optical Mouse
Machine Covers/Frame are cleaned (minor scratches can be present)
System is calibrated on PSL NIST Calibration Standards using OEM test specification guide lines
System is tested to verify compliance to OEM installed specifications
International Shipping Crate

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